发明名称 ASSEMBLAGE PAR ADHESION MOLECULAIRE DE DEUX SUBSTRATS
摘要 <p>An assembly method to enable local electrical bonds between zones located on a face of a first substrate and corresponding zones located on a face of a second substrate, the faces being located facing each other, at least one of the substrates having a surface topography. The method forms an intermediate layer including at least one burial layer on the face of the substrate or substrates having a surface topography to make it (them) compatible with molecular bonding of the faces of substrates to each other from a topographic point of view, resistivity and/or thickness of the intermediate layer being chosen to enable the local electrical bonds, brings the two faces into contact, the substrates positioned to create electrical bonds between areas on the first substrate and corresponding areas on the second substrate, and bonds the faces by molecular bonding.</p>
申请公布号 FR2872627(B1) 申请公布日期 2006.08.18
申请号 FR20040051374 申请日期 2004.06.30
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE ETABLISSEMENT PUBLIC A CARACTERE SCIENTIFIQUE TECHNIQUE ET INDUSTRIEL 发明人 FEUILLET GUY;MORICEAU HUBERT;POCAS STEPHANE;JALAGUIER ERIC
分类号 H01L21/50;H01L33/00 主分类号 H01L21/50
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