| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an output compensation method of a laser oscillator by which the output of the laser oscillator is stabilized. <P>SOLUTION: A controller 15 finds waveform of a laser beam which is split by a beam splitter 8 and fed back through a power monitor 11, and a high-speed AD conversion unit 12 for each laser shot. Then the waveform is compared with a target output waveform for each laser shot to find a homothetic ratio (variation), and a voltage/current convertor 5 is so controlled that an excited current I0, compensated base on a value which is smaller in the homothetic ratio and a compensation upper limit value, is supplied to an exciting light source 2. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
