| 摘要 |
A substrate transportation device includes a housing formed of an upper surface, a lower surface, and opposing sidewalls. The housing has a rear opening through which the substrate enters the housing and a front opening through which the substrate exit the housing. A plurality supporting members are disposed within the housing and operatively connected to the opposing sidewalls which can be formed as a plurality of columns. A motor and motor shaft transmit a rotational force to an axle system, which transmits rotational force to the supporting members to transfer the substrate into or out of the housing randomly.
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