发明名称 Masking for wafer fabrication
摘要 The invention comprises a method of preparing masks for wafer fabrication comprising the steps of determining the length of the required mask image size along one axis, determining the length of the required mask image size along a second axis, comparing the length of the required mask image size to data related to the standard image field size, and applying a one dimension rule to extend the standard image field size along one dimension if needed.
申请公布号 US2006183026(A1) 申请公布日期 2006.08.17
申请号 US20050059788 申请日期 2005.02.17
申请人 TEE LING T;PEH LIAN S 发明人 TEE LING T.;PEH LIAN S.
分类号 G03F1/00;G03C5/00 主分类号 G03F1/00
代理机构 代理人
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