Spectral infrared elipsometer with an azimuth between the incidence planes of terahertz beams to determine optical parameters of a material sample

摘要

The apparatus has a polarizing interferometer comprising a beam splitter and fixed and moveable mirrors. The interferometer has an alternating output to convey the teraradiation and a constant output to feed the teraradiation back to the source. A beam splitter is also a linear polarizer. The mirrors are inclined and have an even number of reflections. The incident planes of the interferometer and the elipsometer are at an azimuth angle of 22.5 deg or a multiple thereof to each other. The optical parameters are directly derived from the cosine and sine transformation of the interferogram.