| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and device for detecting defect of a substrate capable of reducing unevenness of a luminous energy distribution within a substrate face to enhance defect detecting precision. SOLUTION: The device 20 has a lens part 22 for diverging a detecting light 27 within the substrate 25, and a light source part 21 having a function duplicating photoconductive areas for the detecting light 27, the detecting light 27 is advanced under the condition where it is diverged within the substrate 25 by the lens part 22, the photoconductive areas are duplicated by an arranging position of a light source 28 to superimpose the plurality of the detecting lights 27, the luminous energy distribution is thereby uniformized to prevent a difference from being generated by the luminous energy distribution, and the light scattered caused by a defect 26 is surely detected to detect the defect highly precisely. COPYRIGHT: (C)2006,JPO&NCIPI
|
