| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric element unit which can maintain sufficient airtightness for a long period of time, keeps its high energy conversion efficiency, considerably improves its mechanical strength and has a nonlinear voltage output characteristic in response to an external force by combining a thin film piezoelectric element with a shock absorbing material (shock buffering material). SOLUTION: The piezoelectric element unit which is made up by covering the thin film piezoelectric element with a soft resin, is characterized such that at least the surface of the soft resin is made concavo-convex on the side on which the thin film piezoelectric element senses the external force, and preferably a cross section of a convex portion is in the form of a trapezoid, a triangle or a dome type. COPYRIGHT: (C)2006,JPO&NCIPI
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