| 摘要 |
PROBLEM TO BE SOLVED: To provide an infrared detector capable of increasing the detection sensitivity. SOLUTION: The infrared detector 200 is constituted by arranging an infrared sensor element 100 in a case 300 formed of a pedestal 310 and a cap 320. The infrared sensor element 100 has a substrate 10, a detecting section 20, an infrared absorption film 30, and an infrared reflective film 40. The substrate 10 has a cavity section 11, and an insulating film 12 as a membrane 13 is formed on the upper surface of the substrate 10 including the cavity section 11. The detecting section 20 has a hot contact 20c formed on the membrane 13 with small heat capacity, and a cold contact 20d formed on the substrate 10 with large heat capacity outside the membrane 13. The infrared absorption film 30 is formed on the membrane 13 so as to cover a part of the detecting section 20 at least including the hot contact 20c. The infrared reflective film 40 is formed in a region other than the infrared absorption film 30. COPYRIGHT: (C)2006,JPO&NCIPI
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