| 摘要 |
PROBLEM TO BE SOLVED: To measure the inclination of an end face with respect to a side face of a cylindrical member, cylindricality, or the like, using a simple structure with high accuracy. SOLUTION: The measuring profile apparatus comprises a V-block 23 which is arranged on a standard plane 21 rotatably supporting the cylindrical member 22 and a reflective mirror 24 which is arranged with an inclination of 45 degrees, with respect to the standard plane 21 in the vicinity of the V-block 23 so that it faces one end face 22b in the axial direction of the cylindrical member 22, which is supported by the V-block 23, to have light from an optical interferometer 10 irradiated onto the one end face 22b. Light reflected off the side face 22a of the cylindrical member 22 and light reflected off the one end face 22b are introduced into the optical interferometer 10. Interference fringes 26 are thereby formed for measuring the inclination of the one end face 22b with respect to the side face 22a of the cylindrical member 22 and the cylindricity of the side face 22a. COPYRIGHT: (C)2006,JPO&NCIPI
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