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发明名称
SHUTTER DEVICE OF VACUUM DEPOSITION APPARATUS
摘要
申请公布号
KR20060090887(A)
申请公布日期
2006.08.17
申请号
KR20050011595
申请日期
2005.02.11
申请人
SAMSUNG SDI CO., LTD.
发明人
KIM, JIN PIL;KIM, YOUNG KAG
分类号
H01L21/203
主分类号
H01L21/203
代理机构
代理人
主权项
地址
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