| 摘要 |
PROBLEM TO BE SOLVED: To improve efficiency housing substrates in transporting substrates such as large glass substrates and reduce production cost of a flat display device etc. SOLUTION: The cassette 1 for a substrate is provided with a first frame 2 formed into a cuboid having two openings of front and rear directions; a plurality of pairs of fixed side substrate supports 2d protruding oppositely each other from each of two inner side faces of the first frame; a second frame 3 formed into a cuboid having two openings of front and rear directions, slidably housed in the inside of the first frame in forward and backward directions and horizontal direction, and capable of being drawn from at least one direction of the forward and backward directions; and a plurality of pairs of movable side substrate supports 3c oppositely protruding from each of two inner side faces of the second frame, each entering between the two adjacent fixed side substrate supports of the fixed side substrate supports and oppositely protruding when the second frame is housed in the inside of the first frame. COPYRIGHT: (C)2006,JPO&NCIPI
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