发明名称 OPTICAL COMPONENT AND MANUFACTURING METHOD THEREOF
摘要 PROBLEM TO BE SOLVED: To provide an optical component capable of attaining a high extinction ratio without using expensive manufacturing equipment, and to provide the manufacturing method of the optical component. SOLUTION: A grid 35 made of aluminum 30 is formed on a quartz substrate 10 and a grid 36 made of aluminum 30 is formed on a quartz substrate 15 respectively. The quartz substrates 10, 15 are made to face each other and are adhered to each other with adhesive such that the grid 35 of the quartz substrate 10 is shifted from the grid 36 of the quartz substrate 15 approximately by a half pitch in the grid pitch direction. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006215230(A) 申请公布日期 2006.08.17
申请号 JP20050027316 申请日期 2005.02.03
申请人 NIKON CORP 发明人 HAYASHI MASATOSHI
分类号 G02B5/30 主分类号 G02B5/30
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