| 摘要 |
PROBLEM TO BE SOLVED: To facilitate alignment of a probe to a wire of a device to be inspected. SOLUTION: The probe D2 comprises an insulating base 51, an inspection wire 53 disposed on the surface, a covering member 55 that is arranged so as to cover the base 51 and has a through-hole 56 at a position overlapping the inspection wire 53, and a contact section 57 that is formed inside the through-hole 56, is electrically connected to the inspection wire 53, and projects from the surface of the covering member 55. The inspection wire 53 linearly extends in the x-direction where a plurality of wires of the device to be inspected are arranged, and overlaps the inner peripheral edge positioned in the x-direction, of the through-hole 56 of the covering member 55. COPYRIGHT: (C)2006,JPO&NCIPI
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