Washing appts. for cleaning of semiconductor substrate surface - has jet nozzle with mixer to mix fluid and gas before guiding droplets toward substrate surface

摘要

The appts. includes a jet nozzle (11) coupled a liq. supply device (23) and a gas supply device (22). A mixer for the liq. and gas supplies the jet nozzle and forms the cleaning droplets. Pref. the jet nozzle and mixer contain two feed lines, one for the gas and the other one for the liq.. The second feed line end section extends from outside through the first feed line wall into its inside. The second feed line end section extends in the same direction as the first feed line. Several jet nozzles may be arranged in a regular spacing such that they do not intersect.