| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a pellicle that can be reliably stuck to a photomask without using a press machine. <P>SOLUTION: The pellicle 100 comprises a pellicle frame 110, a pellicle membrane 120 and a double-sided tape 130. The bottom face of the pellicle frame 110 has two grooves 111, 112, and the side face of the pellicle frame 110 has an exhaust hole 113 communicating with the groove 111 and an air hole 114 connected to the groove 112. On sticking the pellicle 100 to a photomask, first, the release sheet of the double-sided tape 130 is removed and the pellicle 100 is placed on the photomask so that the adhesive face of the double-sided tape 130 is brought into contact with the photomask. Then the exhaust hole 113 is connected to a vacuum pump to discharge air in the groove 111. After the air in the groove 111 is discharged, the pellicle frame 110 is pressed to the photomask by atmospheric pressure. Consequently, the pellicle frame 110 is reliably stuck to the photomask by the double-sided tape 130. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
