发明名称 |
Rotating body dynamic quantity measuring device and system |
摘要 |
A single crystal semiconductor including a Wheatstone bridge circuit formed of an impurity diffusion layer whose longitudinal direction is aligned with a particular crystal orientation is connected to a rotating body. A rotating body dynamic quantity measuring device and a system using the measuring device are fatigue- and corrosion-resistant because of the single crystal semiconductor used and are not easily affected by temperature variations because of the bridge circuit considering a single crystal anisotropy.
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申请公布号 |
US2006179958(A1) |
申请公布日期 |
2006.08.17 |
申请号 |
US20060352210 |
申请日期 |
2006.02.13 |
申请人 |
OHTA HIROYUKI;SUMIGAWA TAKASHI |
发明人 |
OHTA HIROYUKI;SUMIGAWA TAKASHI |
分类号 |
G01L1/22 |
主分类号 |
G01L1/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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