Positioning board for positioning heater lines during plasma enhanced CVD (PECVD)

摘要

A positioning board used in processes of Plasma Enhanced CVD (PECVD) for positioning a heater line on a heater block includes a pressing portion at an underside thereof and a notch is defined in the pressing portion. The heater line is engaged with the notch when the positioning board is pressed on the heater block so as to secure the heater line.