MULTI-STAGE SINGLE- DRIVE FOUP DOOR OPENING SYSTEM,申请号KR20017012260-传众专利搜索

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发明名称	MULTI-STAGE SINGLE- DRIVE FOUP DOOR OPENING SYSTEM
摘要
申请公布号	KR100613172(B1)	申请公布日期	2006.08.17
申请号	KR20017012260	申请日期	2001.09.26
申请人		发明人
分类号	H01L21/68	主分类号	H01L21/68
代理机构		代理人
主权项
地址

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