THIN FILM PIEZOELECTRIC RESONATOR AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method for a thin film piezoelectric resonator which can improve crystallinity of a thin film piezoelectric body and facilitates micromachining, and a thin film piezoelectric resonator whose frequency can be made high and which can be made small-sized.

SOLUTION: The manufacturing method for the thin film piezoelectric resonator 1 includes the steps of: forming a 1st electrode layer on a substrate 2; forming a 1st piezoelectric body layer on the 1st electrode layer; forming a 1st piezoelectric body 61 by patterning the 1st piezoelectric layer and forming a 1st electrode 5 by patterning the 1st electrode layer; cleaning the surface of the piezoelectric body 61; forming a 2nd piezoelectric body 63 on the cleaned surface of the 1st piezoelectric body 61 to form a piezoelectric body 6; and forming a 2nd electrode 82 on the piezoelectric body 6.

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