| 摘要 |
A outer surface-inspecting method for judging whether a defect of a defective portion ( 27 ) extracted from an inspection area in an image ( 21 A) of an object to be inspected through comparison with a template is acceptable or not, including: dividing the inspection area into a plurality of sections ( 22, 23, 24 a, 24 b, 25 a, 25 b, 28 a, 28 b, 28 c) respectively having different acceptable levels (CONDITION 1-6); judging, when at least one extracted defective portion ( 27 ) spreads out over some of the sections ( 28 a, 28 b, 28 c) respectively having different acceptable levels, whether the defect of the defective portion ( 27 ) is acceptable or not based on a strictest acceptable level (CONDITION 3) of all the acceptable levels (CONDITION 3-5) respectively set on the plurality of sections ( 28 a, 28 b, 28 c) on which the defective portion ( 27 ) is located.
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