发明名称 |
Method for correcting systematic errors in a laser processing system |
摘要 |
A method for calibrating a laser micro-machining system in three dimensions includes scanning a sample workpiece to determine the 3D surface, calculating the best fit surfaces to the scanned data in a series of steps, and storing the results so that subsequent workpieces can be calibrated to remove systematic errors introduced by variations in an associated material handling subsystem. The method optionally uses plate bending theory to model particulate contamination and splines to fit the 3D surface in a piecewise fashion to minimize the effect of local variations on the entire surface fit.
|
申请公布号 |
US2006180581(A1) |
申请公布日期 |
2006.08.17 |
申请号 |
US20050059025 |
申请日期 |
2005.02.15 |
申请人 |
ELECTRO SCIENTIFIC INDUSTRIES, INC. |
发明人 |
SWARINGEN STEPHEN N.;BRULAND KELLY;WELLS ANDREW |
分类号 |
B23K26/03;G06F19/00 |
主分类号 |
B23K26/03 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|