| 摘要 |
PROBLEM TO BE SOLVED: To provide a structure of a valve disc reducing a closing force in a vacuum valve having an annular seal body suitable for high vacuum. SOLUTION: This vacuum valve comprises a valve body 4 having a conical seal surface 5, the valve disc 6 having a conical seal surface 18, and the annular seal body 19 having second seal surfaces 20 and 21. The seal surface areas of the valve disc 6, the valve body 4, and the annular seal body 19 are formed of metals, the valve disc 6 is formed in a bent or curved shape, and the angle 28 of a radial outer peripheral part adjacent to the seal surface 5 relative to a closing direction 15 is 90°or less. An outer peripheral edge end part 33 is displaced by at least 0.1% of the diameter of the valve disc by elastic deformation in the direction of a center axis 27 relative to an opening position. COPYRIGHT: (C)2006,JPO&NCIPI |
