| 摘要 |
PROBLEM TO BE SOLVED: To realize reduction in the firing temperature and shortening of the firing time by making a chemical imidation agent interact in the vapor phase in a polyimide endless conveyer manufacturing process, and to obtain an endless conveyer having characteristics such as sufficient strength or the like while reducing surface defects such as voids of the belt surface generated by baking at the conventional high temperature, in addition to improve the stability of a polyamic acid solution and improve the process reliability by not adding a chemical imidation agent directly in a polyamic acid solution. SOLUTION: In the polyimide endless conveyer manufacturing process, a polyamic acid which is the precursor of the polyimide is applied on a cylinder-shape substrate, after performing the drying process, a chemical imidation agent is made to interact as a gas, and the baking process is performed. COPYRIGHT: (C)2006,JPO&NCIPI |
