| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and apparatus used for inspecting a workpiece surface using a light reflected from the workpiece surface. SOLUTION: In the method and apparatus for inspecting a substrate in which a laser beam traces a path along the substrate surface, the laser beam is circularly polarized by, for example, a 1/4 wavelength retarder. This permits inspecting the substrate with less sensitivity to scratch direction than if the laser beam were not circularly polarized. COPYRIGHT: (C)2006,JPO&NCIPI
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