| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic deflection system for corpuscular radiation, in which individual electrodes permanently have and retain a very exact axially symmetric arrangement relative to one another. SOLUTION: The present invention relates to an electrostatic deflection system for corpuscular radiation which can be used particularly for microstructured and nanostructured applications in a lithography device or a measuring device. According to the proposed object of the invention, the individual electrodes of a deflection system of this kind should permanently have and retain a very exact axially symmetric arrangement relative to one another. In the electrostatic deflection system according to the invention, rod-shaped electrodes are held in an axially symmetric arrangement in an inwardly hollow carrier through which a corpuscular beam can be directed. The carrier is formed of at least two, and at most four, carrier members which are connected to one another. COPYRIGHT: (C)2006,JPO&NCIPI
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