| 摘要 |
PROBLEM TO BE SOLVED: To provide a chamber apparatus provided with an energy-wave-reflecting device. SOLUTION: The chamber apparatus provided with the energy-wave-reflecting device comprises an energy wave generator and a curvy spherical surface of the chamber. The energy wave is converted into a microwave or light to provide energy. The curvy spherical surface of the chamber is composed of at least one fresnel reflector, and reflects the energy wave to project it onto a platform. The curvy spherical surface of the chamber is composed of the fresnel reflector and the partially curvy spherical surface, or is composed entirely of the fresnel reflector. The chamber apparatus greatly increases energy density and an area in a projected region, uniformizes energy distribution, has many high-energy areas in the chamber, and saves a facility space, a facility cost and a manufacturing cost. COPYRIGHT: (C)2006,JPO&NCIPI
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