| 摘要 |
A flexible substrate ( 110 ) having flexibility and a fixed substrate ( 120 ) disposed so as to oppose it are supported at their peripheral portions by a sensor casing ( 140 ). An oscillator ( 130 ) is fixed on the lower surface of the flexible substrate. Five lower electrode layers (F 1 to F 5 : F 1 and F 2 are disposed at front and back of F 5 ) are formed on the upper surface of the flexible substrate. Five upper electrode layers (E 1 to E 5 ) are formed on the lower surface of the fixed substrate so as to oppose the lower electrodes. In the case of detecting an angular velocity omegax about the X-axis, an a.c. voltage is applied across a predetermined pair of opposite electrode layers (E 5 , F 5 ) to allow the oscillator to undergo oscillation Uz in the Z-axis direction. Thus, a Coriolis force Fy proportional to the angular velocity omegax is applied to the oscillator in the Y-axis. By this Coriolis force Fy, the oscillator is caused to undergo displacement in the Y-axis direction. As a result, the distance between opposite electrode layers (E 3 , F 3 ) arranged in the positive direction of the Y-axis becomes smaller, and the distance between opposite electrode layers (E 4 , F 4 ) arranged in the negative direction of the Y-axis becomes greater. Thus, capacitance value C 3 increases and capacitance value C 4 decreases. By change of the capacitance value, it is possible to detect the magnitude of the Coriolis force Fy, and to determine angular velocity omegax. Similarly, it is possible to detect an angular velocity omegay about the Y-axis and an angular velocity omegaz about the Z-axis.
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