发明名称 |
VIBRATION DAMPING FOR PHOTOLITHOGRAPHIC LENS MOUNT |
摘要 |
<p>A connection between two components supported in a mutually vibrating fashion has at least one connection element connecting the two components, and a gap located between the two components in which a medium is located. The gap has a width small enough to largely prevent a displacement of the medium inside the gap during comparatively fast relative movements between the two components .</p> |
申请公布号 |
WO2006084657(A1) |
申请公布日期 |
2006.08.17 |
申请号 |
WO2006EP01046 |
申请日期 |
2006.02.07 |
申请人 |
CARL ZEISS SMT AG;GEUPPERT, BERNARD;SOELL, LEONHARD |
发明人 |
GEUPPERT, BERNARD;SOELL, LEONHARD |
分类号 |
G02B13/18;F16F9/06;F16F9/12;F16F15/16;G02B7/02;G03F7/20 |
主分类号 |
G02B13/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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