发明名称 |
Apparatus and method for contacting of test objects |
摘要 |
The invention relates to methods for positioning of a substrate and contacting of the test object for testing with a test apparatus with an optical axis and corresponding devices. Thereby, the substrate is put on the holder. The substrate is positioned relative to the optical axis. A contact unit is also positioned relative to the optical axis, whereby the contact unit is positioned independent of the positioning activity of the substrate. Thereby, a flexible contacting of test objects on the substrate can be realized.
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申请公布号 |
US2006181290(A1) |
申请公布日期 |
2006.08.17 |
申请号 |
US20060398052 |
申请日期 |
2006.04.05 |
申请人 |
APPLIED MATERIALS, INC. (GMBH) |
发明人 |
BRUNNER MATTHIAS |
分类号 |
G01R31/305;G01R31/28;G01R31/302;G09G3/00 |
主分类号 |
G01R31/305 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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