| 摘要 |
A MEMS resonator and a method for manufacturing thereof are provided, in which an adsorption of a beam into a substrate in a wet process when manufacturing a MEMS is prevented and other oscillation modes, which are unnecessary, than a required oscillation mode are not mixed at the time of operation. Further, a communication apparatus including a filter that has the MEMS resonator is provided. The MEMS resonator includes a substrate in which a lower electrode is formed and a beam formed on the substrate, in which at least one support column is provided between the substrate and the beam. As a filter, the communication apparatus includes a filter of the above MEMS resonator.
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