| 摘要 |
PROBLEM TO BE SOLVED: To obtain a structure of a vibrator whose electrode intersection area can be made large while an increase in occupation area is suppressed and to obtain a structure of a vibrator whose electrode intersection area can be made large without sacrificing patterning precision nor simplicity of a manufacturing process. SOLUTION: The vibrator 100 is configured to generate mechanical longitudinal vibration on a substrate 101 with an electrostatic force, and equipped with a 1st counter electrode 121 having a counter surface 121a at its periphery and a 2nd counter electrode 122 having a plurality of vibration electrodes 111 which are peripherally arranged around the 1st counter electrode and supported to extend and contract in a direction radially to contact and leave the 1st counter electrode and each have a vibration surface 111a opposite the counter surface 121a of the 1st counter electrode inside a radius direction R and another vibration surface 11b outside the radius direction R, and a counter surface 122a opposite to radially outside vibration surfaces 111b of the plurality of vibration electrodes. COPYRIGHT: (C)2006,JPO&NCIPI
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