| 摘要 |
PROBLEM TO BE SOLVED: To provide a displacement detection device for a magnetic bearing device capable of accurately detecting displacement of a rotor in a radial control shaft direction and an axial control shaft direction, having a displacement sensor unit of a simple structure and a few number of parts, easy for manufacturing, and capable of reducing cost. SOLUTION: This displacement detection device has two pairs of displacement sensor units 6, 7 opposing to an edge part of one side of target parts 15, 17 of a rotor 1 and is provided with four displacement sensors 16a, 16b, 16c, 16d, 18a, 18b, 18c, 18d arranged in a circumference direction with equal intervals to position on two radial control shafts. A displacement operation means determines displacement of the rotor in the two radial control shaft direction in a part of one displacement sensor unit 6, displacement of the rotor 1 in the two radial control shaft direction in a part of another displacement sensor unit 7, and displacement of an axial control shaft direction of the rotor 1 by performing predetermined operation with using output of eight displacement sensors. COPYRIGHT: (C)2006,JPO&NCIPI
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