| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for adjusting a flow rate of a micro valve having a simple structure, which can be easily incorporated into a micro total analysis system, and capable of controlling the flow of fluid in a minute flow passage. SOLUTION: The method for adjusting a flow rate of a micro valve has the following characteristics. The micro valve is composed so that a plate-like valve body is stored in a valve chamber, which has a first opening part for fluid injection/discharge and a second opening part for fluid injection/discharge formed to the lower wall, in order to constantly cover the second opening part for fluid injection/discharge via an air gap. The upper wall of the micro valve is pressed by a piezo-electric element. Consequently, the valve body is pressed in the lower wall direction and the second opening part for fluid injection/discharge is closed. COPYRIGHT: (C)2006,JPO&NCIPI
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