| 摘要 |
An image forming device is provided with a work temperature measuring means for measuring a standby work temperature; a stage temperature measuring means for measuring a temperature of a stage; and a waiting time computing means for obtaining a time to be waited until the work temperature stabilizes, from a difference between the work temperature measured by the work temperature measuring means and the stage temperature measured by the stage temperature measuring means. After the waiting time obtained by the waiting time computing means is passed, mark measurement and exposure are performed. Even substrates having different thicknesses and sizes can be exposed at a high positional accuracy. |
