Reactive material wet-chemical removal method for e.g. bulk acoustic wave filter, involves bringing material in contact with wet-chemical treatment unit through access opening in structure for removing material from structure

摘要

The method involves bringing a reactive material (16) in contact with a wet-chemical treatment unit (24) through an access opening in a material structure (12) for removing the material from the structure. A mechanical oscillation is produced in the unit or in the structure, when the material is brought into contact with the unit. The unit has a treatment area surrounded by a cover structure and a substrate of the structure (12). An independent claim is also included for a device for wet-chemical removal of a reactive material in a material structure, comprising a generating unit.