摘要 |
A lifting stage includes a carrier frame, an object plate configured to carry an object, a cross-member, and a parallel articulation arrangement configured to articulate the object plate to the carrier frame so that the object plate is capable of being raised or lowered relative to the carrier frame without tilting. The parallel articulation arrangement includes a number of parallel articulations and connects the cross-member to the carrier frame and the cross-member to the object plate.
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