发明名称 POSITIONING DEVICE AND CONTROL METHOD THEREOF
摘要 <P>PROBLEM TO BE SOLVED: To provide a positioning device with a simple structure capable of setting the operation starting time of an operation unit and a control method thereof. <P>SOLUTION: When a mover 22 moving along a predetermined guide path stops, the operation unit 24 is subjected to residual vibration based on the inertial force acting on the operation unit 24 supported on the mover 22. At that time, the waveform of a sensor signal output from a sensor 32 is observed. Thus, the residual vibration is detected according to the sensor signal output from the sensor 32. The position of the operation unit 24 can accurately be specified based on the waveform of the sensor signal. The position of the operation unit 24 is specified as suitable for operation. Thus, the operation starting time of the operation unit 24 can be set. Even during the residual vibration, the operation unit 24 can start operation in a short time after the stoppage of the mover 22. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006216852(A) 申请公布日期 2006.08.17
申请号 JP20050029378 申请日期 2005.02.04
申请人 FUJITSU LTD 发明人 KOBAYASHI TAISAN;TAKADA EIJI;SUDO KAZUMI
分类号 H01L21/60;H05K13/04 主分类号 H01L21/60
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