CONDUCTIVE POLYMER PATTERNED FILM AND METHOD OF PATTERNING THE SAME, AND ORGANIC ELECTROLUMINESCENT ELEMENT USING THE FILM AND METHOD OF MANUFACTURING THE ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a method of patterning a conductive polymer. SOLUTION: The method of patterning the conductive polymer includes a step of forming a conductive polymer layer 220 on a substrate 210, a step of arranging a shadow mask 230 on the conductive polymer layer, and a step of irradiating the conductive polymer layer with the particle beam 240 charged with a charge through the shadow mask and forming an insulating layer and the pattern layer of the conductive polymer. COPYRIGHT: (C)2006,JPO&NCIPI