| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor acceleration sensor formed into a nearly L-shape, comprising a beam part and a weight part surrounded by the beam part, in which the horizontal movement of the weight part is restricted by a simple structure and breakage of the beam part, is prevented. SOLUTION: Adjacent to a tip part 4a of the long and narrow L-shaped beam part 4, formed by surrounding a part which is a square on a plan view, constituting the weight part 3, a protruded part 15 protruding from a fixed part 2 toward the weight part 3 and a receiving recessed part 16, which protrudes from the weight part 3 toward the fixed part 2 and surrounds the protruded part 15 are formed. The external shape of the protruded part 15 and the inner wall of the recessed part 16 have nearly the same shape, thereby restricting the movement of the weight part 3 in any horizontal direction that is perpendicular to the vertical direction, by allowing the protruded part 15 to be received by the recessed part 16. Even if a lateral impact is applied to the acceleration sensor 1, the weight part 3 will not be displaced by a large amount, and the beam part 4 will not be broken due to excessive stress applied to the beam part 4. COPYRIGHT: (C)2006,JPO&NCIPI |
