发明名称 |
Ultra low contact area end effector |
摘要 |
The present invention comprises a vacuum end effector having workpiece supports that work in conjunction with distorted workpiece surfaces. In one embodiment, each workpiece support has the ability to gimbal and conform the workpiece surface in contact with an outer edge of the support. Each workpiece support preferably provides a knife-like contact edge to minimize the contact area between the support and the workpiece while still providing an effective vacuum area to hold the wafer securely on the support. In another embodiment, each workpiece support is replaceable without having to remove the end effector from the robot assembly
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申请公布号 |
US2006181095(A1) |
申请公布日期 |
2006.08.17 |
申请号 |
US20060404536 |
申请日期 |
2006.04.14 |
申请人 |
BONORA ANTHONY C;HINE ROGER G |
发明人 |
BONORA ANTHONY C.;HINE ROGER G. |
分类号 |
B25J15/06;H01L21/683;H01L21/687 |
主分类号 |
B25J15/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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