| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a polishing device capable of preventing a workpiece from being flawed by abrasive powder while preventing the wear of a tooth part of a gear to attain a long service life. <P>SOLUTION: The polishing device polishes the workpiece by an upper surface plate and a lower surface plate by engaging external teeth 13a of a carrier 13 for holding the workpiece, with internal teeth of an outer pin gear 11 and external teeth of an inner pin gear 12 respectively to rotate and revolve the carrier 13. At least one of the internal teeth of the outer pin gear 11 and the external teeth of the inner pin gear 12 is formed of a plurality of tooth parts 20, 30 provided at circumferentially constant spaces at the pin rings 11b, 12b, and having pin bodies 22 projected upward and supported to the pin rings 11b, 12b rotatably around axes, and cylindrical collars 24 rotatably fitted to the outer peripheries of the pin bodies 22. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
