| 摘要 |
PROBLEM TO BE SOLVED: To acquire a surface treatment method of a material for detecting the track of a particle beam and capable of securing satisfactory surface conditions after etching, suppressing the occurrence of noise (pseudo-pits) similar to etch pits, thereby securing a sufficiently large ratio of etch pits, which is formed by the track of particles in an etched surface, to background, and easily discriminating etch pits at observation. SOLUTION: The surface of the material is surface-treated with a treating agent i. e. a plasticizer having the property of plasticizing the material. For example, the surface of the material is immersed in a solution of di-n-butyl phthalate to treat the surface of the material. COPYRIGHT: (C)2006,JPO&NCIPI |
