| 摘要 |
PROBLEM TO BE SOLVED: To provide a device for measuring a flow rate having high following property even under a condition having high flow rate variation. SOLUTION: A delay generating means 9 slightly delays the transmission start timing of a first oscillator 2 from a measurement start timing of a time measuring means 7. The propagation time is sequentially determined by a measurement control means 11 while the setting of the delay time is changed with a resolution smaller than the time measuring resolution of the time measuring means 7. Therefore, the time can be read with a resolution further smaller than the time measuring resolution of the time measuring means 7, and continuous repeating measurement is not required. Therefore, the degree of freedom of measurement interval increases, and flow rate measurement having high following property to the flow rate variation is allowed. COPYRIGHT: (C)2006,JPO&NCIPI
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