| 摘要 |
A vacuum apparatus has a vacuum chamber provided with a gas inlet and a gas outlet, and mechanical vacuum pumps in a plurality of stages for reducing a pressure inside the vacuum chamber and maintaining the pressure-reduced state. The vacuum apparatus has an ejector pump ( 60 ) connected to a discharge port ( 57 ) of a screw pump (A) as the vacuum pump at the last stage among the vacuum pumps. The vacuum apparatus is reduced in power consumption and used in the semiconductor manufacturing field and so on.
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