METHOD OF FORMING STI REGIONS IN ELECTRONIC DEVICES

摘要

The invention relates to a method of manufacturing integrated circuits and in particular to the step of forming shallow trench isolation (STI) zones. The method according to the present invention leads to electronic devices and to integrated circuits having reduced narrow width effect and edge leakage. This is achieved by performing an extra implantation step near the edge of the STI zone, after formation of the STI zones.