| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a highly accurate vibrator having a characteristic unchanging with the passage of time and excellent reliability, and a manufacturing method of the vibrator suitable for miniaturization. <P>SOLUTION: This manufacturing method of the vibrator, wherein an electrode is formed on the vibrator having a base part and a vibration leg formed protrusively from the base, part has a process for forming a protection film patterned on the electrode by a photolithography method; a process for adjusting a vibration mode of the vibration leg by balancing the weight of the vibration leg by removing especially a part of the vibration leg of the vibrator; and a process for removing dust adhering in the adjustment process of the vibration mode simultaneously by dissolving and removing the protection film. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
