| 摘要 |
One transport robot transports an FOUP among a load port, a third mounting section, and a shelf array. The other transport robot, which is disposed on the reverse side of the one transport robot with the shelf array interposed between the two, transports an FOUP between the shelf array and a second mounting section. Executed in the third mounting section are mapping processing and transportation of a substrate encased in an FOUP to a substrate processing unit. This enables a plurality of transportations to be executed at almost the same time. Additionally, the two transport robots can execute transportation of an FOUP without mutual spatial interference.
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