| 摘要 |
A wafer loadlock chamber includes a loadlock housing having at least a loading port, at least a loading door deposited on the outside of the loadlock housing, and at least a wafer holder deposited in the inside of the loadlock housing for loading a wafer. In addition, the wafer holder has at least a wafer shelf and a plurality of locators mounted on the wafer shelf. When the wafer is loaded on the wafer shelf, the bottom surface of the wafer only contacts the locators.
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