| 摘要 |
<p>PROBLEM TO BE SOLVED: To facilitate the position fitting of a stage part 21 not by visual inspection and in a short time. SOLUTION: A manual prober 51 is provided with a stage part 21, that slides on a base molding board 2 which holds a semiconductor wafer, has the base molding board 2 fixed at an arbitrary position, and is also provided with a guide mechanism that guides the stage part 21 and stabilizes its movement to X- and Y axis directions. A position detecting means 52 for detecting the position of the stage part 21 and a indication means 53 for indicating the position of the stage part 21 are provided. The position detecting means 52 is constituted of an X-axis linear encoder 55 to detect the position of an X-axis guide 45, and a Y-axis linear encoder 56 for detecting the position of a Y-axis guide 42.</p> |
