| 摘要 |
<p>PROBLEM TO BE SOLVED: To prevent the deformation of a substrate by making the intra-plane temperature distribution of the substrate caused by heat treatment uniform, after the side slipping of the substrate on a hot plate has been prevented. SOLUTION: A plate 42 of a hot plate 40 is provided with a flange section 42a, projecting upwards along the full outer periphery, and triangular pole-like projecting sections 45, 46, and 47 are fixed to three point (at the positions of the vortices of a regular triangle, which is tangential with the inner periphery) on the inner peripheral surface of the flange section. When a substrate W is put in the recess surrounded by the flange 42a and placed on the hot plate 40, the protrusions 45, 46, and 47 come into contact with the outer edge of the substrate W. Therefore, the protrusions 45, 46, and 47 prevent the side slipping of the substrate W. In addition, since the flange section 4a also becomes hot, when the plate 42 becomes hot and heats the outer peripheral section of the substrate W, the outer peripheral section of the substrate W can become hotter than the central part.</p> |
